the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas - Home - Springer Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays Radial Line Slot Antennas | SpringerLink Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ... Radial Line Slot Antennas | Request PDF
A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source with a narrow process space. A RLSA with paired slots arrayed concentrically on its aperture is designed and applied to a plasma process system which does not need a magnetic field.
The present disclosure relates to a method and an antenna for transmitting/receiving a RF signal at a plurality of different frequencies. Transmitting/receiving a RF signal at a plurality of different frequencies is achieved by providing a … US3668459A - Coupled cavity slow wave circuit and tube using… Each axially aligned array of coupling slots includes means for interrupting the flow of electrons through the slots such as a blocking member or the slots are staggered or offset in radial or angular position such as to block off a line-of … US5370765A - Electron cyclotron resonance plasma source and… A method and apparatus are disclosed employing electron cyclotron resonant (ECR) heating to produce plasma for applications including but not limited to chemical vapor deposition and etching. US5131409A - Device for microwave resonance therapy - Google… The device in accordance with the invention is an apparatus for producing electromagnetic radiation for use in microwave resonance therapy. This device provides improved selectivity of the effect produced by electromagnetic radiation in …
Near field distributions in radial line slot antennas for ...
The plasma produced by a radial line slot antenna (RLSA) source is discussed based on a simulation using a multiphysics coupled 2D fluid model. The technological aspects in a silicon nitride chemical vapor deposition (CVD) process using a disilane and ammonia mixture are addressed. Conformal doping of topographic silicon structures using a ... Fin extension doping for 10 nm front end of line technology requires ultra-shallow high dose conformal doping. In this paper, we demonstrate a new radial line slot antenna plasma source based doping process that meets these requirements.
Exploration COMSOL in Modeling RLSATM CVD Processes
Specifically, the release of electromagnetic antenna signals from antenna 400 depends upon the annular plasma shield 420 being positioned at either one wavelength or greater from the antenna 400, or at distances equal to the wavenumber … US4185213A - Gaseous electrode for MHD generator - Google… The plasma plume is injected into the MHD generator's main channel thereby forming a gaseous electrode. The electrode is oriented in the main channel opposed by at least a second electrode which may be of the same or a different … Atmospheric Pressure Plasma Research Papers - Academia.edu View Atmospheric Pressure Plasma Research Papers on Academia.edu for free.
The SWP plasma source 20 of the system 10 described above, particularly the microwave (MW) radial line slot antenna plasma source that employs the EM wave launcher 22 described in connection with FIGS. 3-6, produces a kind of diffusion plasma that can have quiescent low temperature plasma near the substrate processing region through a pure ...
A radial line slot antenna (RLSA) is a nonresonant multimode waveguide slotted array. To improve the power handing capacity, we design a radial line slow wave structure which replaces a Radial line slot antenna having a conductive layer - Tokyo
A traditional radial line slot antenna (RLSA) is a high gain planar array. To improve the power handling capacity, we design a radial line slow wave structure whichThis high power microwave (HPM) RLSA is fed from a double-layered radial line waveguide to realize the directional radiation of the microwave. Low-cost monopulse radial line slot antenna - IEEE… The antenna is a radial line slot antenna (RLSA), with the slots placed on the upper plate in concentric rings. The radiating element is a slot pairThese feeding networks include a Butler Matrix Network. Comparing both radiation patterns, amplitude and phase, theta and phi angles of arrival... RLSA - Radial Line Slot Antenna